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Chanin : Fuel Cell Guy Uploaded on May 28, 2007
by Chanin

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Sputtering Chamber Modifications

Sputtering Chamber Modifications : I am trying to limit plasma formation to the target disk to ensure that only Palladium-Titanium gets on my Carbon fiber cloth. To do this I had Pyrex glass formed to fit over and around the electrodes to insulate them. This also protects the Neoprene from being singed by hot plasma. This modification took several trips back to the drawing board. Originally I wanted to use only glass, but found that covering the lower stems and base was difficult so I eventually landed on a combination of Neoprene and Pyrex.
I am trying to limit plasma formation to the target disk to ensure that only Palladium-Titanium gets on my Carbon fiber cloth. To do this I had Pyrex glass formed to fit over and around the electrodes to insulate them. This also protects the Neoprene from being singed by hot plasma. This modification took several trips back to the drawing board. Originally I wanted to use only glass, but found that covering the lower stems and base was difficult so I eventually landed on a combination of Neoprene and Pyrex.

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